Browsing by Author "Krasnova, Polina"

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Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology

Fenger, Germain
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Burbine, Andrew
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Torres, J. Andres
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Ma, Yuansheng
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Granik, Yuri
Proceedings paper
2014, Photomask Technology, 16/09/2014, p.92351X
Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)

Fenger, Germain
;
Bekaert, Joost
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Torres, Andres
;
Granik, Yuri
;
Krasnova, Polina
;
Doise, Jan
Proceedings paper
2015, 1st International Symposium on DSA, 26/10/2015