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Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology
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1967 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Views
1967 since deposited on 2021-10-22
415item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations