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Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology
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1969 since deposited on 2021-10-22
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Acq. date: 2025-12-11
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1969 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2025-12-11
Citations