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Browsing by Author "Krawicz, Alexandra"

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    EUV Metal Oxide Resist Development Technology for Improved Sensitivity, Roughness and Pattern Collapse Margin for High Volume Manufacturing

    Dinh, Cong Que
    ;
    Nagahara, Seiji
    ;
    Kuwahara, Yuhei
    ;
    Dauendorffer, Arnaud
    ;
    Yoshida, Keisuke
    Journal article
    2022, JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, (35) 1, p.87-93

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