Browsing by Author "Krawicz, Alexandra"
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Publication EUV Metal Oxide Resist Development Technology for Improved Sensitivity, Roughness and Pattern Collapse Margin for High Volume Manufacturing
;Dinh, Cong Que ;Nagahara, Seiji ;Kuwahara, Yuhei ;Dauendorffer, ArnaudYoshida, KeisukeJournal article2022, JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, (35) 1, p.87-93