Publication:
EUV Metal Oxide Resist Development Technology for Improved Sensitivity, Roughness and Pattern Collapse Margin for High Volume Manufacturing
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1374 since deposited on 2023-04-30
3last month
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Acq. date: 2026-01-09
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Metrics
Views
1374 since deposited on 2023-04-30
3last month
1last week
Acq. date: 2026-01-09
Citations