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Browsing by Author "Kreissig, U."

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    Factors affecting an efficient sealing of porous low-K dielectrics by physical vapor deposition Ta(N) thin films

    Iacopi, Francesca
    ;
    Tokei, Zsolt  
    ;
    Le, Quoc Toan  
    ;
    Shamiryan, Denis
    ;
    Conard, Thierry  
    ;
    Brijs, Bert
    Journal article
    2002, Journal of Applied Physics, (92) 3, p.1548-1554

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