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Browsing by Author "Krumrey, Michael"

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    EUV optical characterization of alternative membrane materials

    Scholze, Frank
    ;
    Laubis, Christian
    ;
    Krumrey, Michael
    ;
    Timmermans, Marina  
    ;
    Pollentier, Ivan  
    Proceedings paper
    2017, Photomask Technology, 11/09/2017, p.104510R

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