Publication:

EUV optical characterization of alternative membrane materials

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2280553

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Author(s)

;

Laubis, Christian

;

Krumrey, Michael

;

Timmermans, Marina

;

Pollentier, Ivan

;

Gallagher, Emily

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Acq. date: 2026-05-01