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Browsing by Author "Kubo, Akihiro"

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    Understanding and improving double patterning CDU through Monte Carlo simulation

    Hooge, Joshua
    ;
    Hatakeyama, Shinichi
    ;
    Kubo, Akihiro
    ;
    Kondo, Yoshihiro
    ;
    Nafus, Kathleen  
    Proceedings paper
    2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008

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