Browsing by Author "Kuhn, M."
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Publication 3D-DRAM Si/SiGe superlattices: inspection strategies and evaluation
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.1342612-1Publication Inline X-ray metrology for Complementary Field-Effect Transistors (CFET)
Proceedings paper2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134261G-1-134261G-7Publication Nanometer-scale SiGe lateral recess metrology in CFET structures using micro-spot X-ray fluorescence
Proceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139810Z