Browsing by Author "Kujala, Jiri"
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Publication On the evolution of strain and electrical properties in as-grown and annealed Si:P epitaxial films for source-drain stressor applications
Journal article2018-04, ECS Journal of Solid State Science and Technology, (7) 5, p.P228-P237Publication On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films
Journal article2016, Applied Physics Letters, (108) 8, p.82106