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Browsing by Author "Kumar, K."

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    Publication

    Improving uniformity of 3-level High Aspect Ratio Supervias

    Montero Alvarez, Daniel  
    ;
    Marien, Philippe  
    ;
    Hermans, Yannick  
    ;
    Vega Gonzalez, Victor  
    Proceedings paper
    2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023

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