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Browsing by Author "Kumar, Sunkuru S."

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    Publication

    Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithography

    Rathore, Ashish  
    ;
    Pollentier, Ivan  
    ;
    Kumar, Sunkuru S.
    ;
    De Simone, Danilo  
    ;
    De Gendt, Stefan  
    Journal article
    2021, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (20) 3, p.034602

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