Publication:

Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithography

Date

2021
Journal article
https://doi.org/10.1117/1.JMM.20.3.034602
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 792.96 KB

Author(s)

Rathore, Ashish  
;
Pollentier, Ivan  
;
Kumar, Sunkuru S.
;
De Simone, Danilo  
;
De Gendt, Stefan  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Abstract

Description

Statistics

Downloads

1486 since deposited on 2021-11-02
22last week
Acq. date: 2026-02-26

Views

1443 since deposited on 2021-11-02
Acq. date: 2026-02-26

Citations

Statistics

Downloads

1486 since deposited on 2021-11-02
22last week
Acq. date: 2026-02-26

Views

1443 since deposited on 2021-11-02
Acq. date: 2026-02-26

Citations