Publication:

Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithography

Date

2021
Journal article
https://doi.org/10.1117/1.jmm.20.3.034602
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Author(s)

Rathore, Ashish  
;
Pollentier, Ivan  
;
Kumar, Sunkuru S.
;
De Simone, Danilo  
;
De Gendt, Stefan  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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1822 since deposited on 2021-11-02
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1455 since deposited on 2021-11-02
Acq. date: 2026-09-21

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