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Articles
Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithography
Publication:
Feasibility of unzipping polymer polyphthalaldehyde for extreme ultraviolet lithography
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Date
2021
Journal article
https://doi.org/10.1117/1.jmm.20.3.034602
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APA
Chicago
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IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rathore, Ashish
;
Pollentier, Ivan
;
Kumar, Sunkuru S.
;
De Simone, Danilo
;
De Gendt, Stefan
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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1855
since deposited on 2021-11-02
35
last month
13
last week
Acq. date: 2026-10-13
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1457
since deposited on 2021-11-02
2
last month
1
last week
Acq. date: 2026-10-13
Citations