Browsing by Author "Kupers, Michiel"
Now showing 1 - 3 of 3
- Results per page
- Sort Options
Publication Application of immersion lithography inside the MEDEA+ LIQUID project
Oral presentation2005, 2nd International Symposium on Immersion LithographyPublication EUV vote-taking lithography for mitigation of printing mask defects, CDU improvement, and stochastic failure reduction
; ; ; ; van de Kerkhof, Mark A..Journal article2018, Journal of Micro/Nanolithography MEMS and MOEMS, (17) 4, p.41013Publication EUV vote-taking lithography: Crazy.... or not ?
Proceedings paper2018, Extreme Ultraviolet (EUV) Lithography IX, 26/02/2018, p.105830I