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    Wafer and simulations study comparing 5 LELE decomposition algorithms for both compliant and non-compliant lay-outs

    Fenger, Germain
    ;
    La Cour, Pat
    ;
    Tritchkov, Alex
    ;
    Komirenko, Sergiy
    ;
    Wiaux, Vincent  
    Proceedings paper
    2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009

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