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Wafer and simulations study comparing 5 LELE decomposition algorithms for both compliant and non-compliant lay-outs
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2018 since deposited on 2021-10-17
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Acq. date: 2026-08-06
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2018 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-08-06
Citations