Browsing by Author "La Via, F."
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Publication Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted 4H-SiC epitaxial layers
Journal article2024, MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, (174) May, p.Art. 108175Publication Growth of thick [111]-oriented 3C-SiC films on T-shaped Si micropillars
Publication Titanium silicidation and secondary defect annihilation in ion beam processed SiGe layers