Browsing by Author "Labrosse, A."
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Publication Development of a comprehensive metrology software platform dedicated to block copolymers thin film nanopatterns
Proceedings paper2015, 1st International Symposium on DSA, 26/10/2015Publication Next generation of decision making software for nanopatterns metrology: application to semiconductor industry
Proceedings paper2016, Metrology, Inspection, and Process Control for Microlithography XXX, 21/02/2016, p.977836