Browsing by Author "Lai, J. G."
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Publication Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers
Journal article2024, NATURE, (634) 8032, p.74-79Publication Front-side Integration of Middle-of-line Stacked Contacts for Monolithic CFET
Proceedings paper2024, 2024 International Interconnect Technology Conference, 2024-06-03Publication Hybrid Channel monolithic-CFET with Si (110) pMOS and (100) nMOS
Proceedings paper2025, IEEE International Electron Devices Meeting (IEDM), 2025-12-06