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Browsing by Author "Lakshmanan, A."

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    Publication

    CVD-Mn(Nx) as copper diffusion barrier for advanced interconnect technologies

    Jourdan, Nicolas  
    ;
    Machillot, Jerome  
    ;
    Barbarin, Yohan
    ;
    Siew, Yong Kong  
    ;
    Ai, Hua
    ;
    Cockburn, Andrew  
    Meeting abstract
    2013, 224th ECS Fall Meeting, 27/10/2013, p.2081

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