Browsing by Author "Lamare, B."

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Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition

Leys, Frederik
;
Liu, Cong
;
Shi, Xiaoping
;
Lamare, B.
;
Takeuchi, Shotaro
;
Schaekers, Marc
Meeting abstract
2008, 214th ECS Meeting, 12/10/2008, p.2386
Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition

Leys, Frederik
;
Liu, Cong
;
Shi, Xiaoping
;
Lamare, B.
;
Takeuchi, Shotaro
;
Schaekers, Marc
Proceedings paper
2008, SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices, 13/10/2008, p.159-162