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Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition
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1881 since deposited on 2021-10-17
Acq. date: 2025-12-09
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1881 since deposited on 2021-10-17
Acq. date: 2025-12-09
Citations