Publication:

Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition

Date

2008
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorLeys, Frederik
dc.contributor.authorLiu, Cong
dc.contributor.authorShi, Xiaoping
dc.contributor.authorLamare, B.
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorSchaekers, Marc
dc.contributor.authorLoo, Roger
dc.contributor.authorWoelk, E.
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-17T08:18:30Z
dc.date.available2021-10-17T08:18:30Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14019
dc.source.beginpage2386
dc.source.conference214th ECS Meeting
dc.source.conferencedate12/10/2008
dc.source.conferencelocationHonolulu, HI USA
dc.title

Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
16926.pdf
Size:
48.65 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions