Browsing by Author "Lammers, Jeroen"

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Investigation of statistical Fluctuations on line edge rougness

Leunissen, Peter
;
Patsis, G.P.
;
Van Steenwinckel, David
;
Lammers, Jeroen
Oral presentation
2005, Charged Particle Lithography Workshop
Lithographic importance of acid diffusion in chemically amplified resists

Van Steenwinckel, David
;
Lammers, Jeroen
;
Leunissen, Peter
;
Kwinten, Hans
Proceedings paper
2005, Advances in Resist Technology and Processing XXII, 28/02/2005, p.269-280