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Browsing by Author "Lammers, Jeroen H."

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    Publication

    A novel method for characterizing resist performance

    Van Steenwinckel, David
    ;
    Gronheid, Roel  
    ;
    Van Roey, Frieda  
    ;
    Willems, Patrick  
    ;
    Lammers, Jeroen H.
    Journal article
    2008, Journal of Micro/Nanolithography, MEMS, and MOEMS, (7) 2, p.23002

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