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Articles
A novel method for characterizing resist performance
Publication:
A novel method for characterizing resist performance
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Steenwinckel, David
;
Gronheid, Roel
;
Van Roey, Frieda
;
Willems, Patrick
;
Lammers, Jeroen H.
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
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1943
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Acq. date: 2025-12-11
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Metrics
Views
1943
since deposited on 2021-10-17
2
last month
1
last week
Acq. date: 2025-12-11
Citations