Browsing by Author "Lane, Austin"

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A progress report on DSA of high-chi silicon containing block co-polymers

Willson, C. Grant
;
Janes, Dustin
;
Ito, Natsuko
;
Blachut, Gregory
;
Sirard, Stephen
Proceedings paper
2018, Advances in Patterning Materials and Processes XXXV, 25/02/2018, p.105860O
Directed self-assembly of silicon-containing block copolymers for 20nm lithography

Blachut, Gregory
;
Sirard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, SPIE Advanced Lithography Conference
Directed self-assembly of silicon-containing block copolymers with a hybrid chemo-/grapho-epitaxial flow

Blachut, Gregory
;
Sirard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, ACS Spring Meeting
Optimizing surface treatments for the directed self-assembly of silicon-containing block copolymers

Blachut, Greg
;
Siarard, Stephen
;
Maher, Michael
;
Asano, Yusuke
;
Someya, Yasunobu
;
Lane, Austin
Oral presentation
2016, ACS Spring Meeting