Publication:

A progress report on DSA of high-chi silicon containing block co-polymers

Date

2018

Proceedings Paper

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Author(s)

Willson, C. Grant

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;

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Blachut, Gregory

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Sirard, Stephen

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Someya, Yasunobu

;

;

Mizuochi, Ryuta

;

;

Vandenberghe, Geert

;

Rincon Delgadillo, Paulina

;

;

Ellison, Christopher

Metrics

1948 since deposited on 2021-10-26

Acq. date: 2026-01-07