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A progress report on DSA of high-chi silicon containing block co-polymers
Publication:
A progress report on DSA of high-chi silicon containing block co-polymers
Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Willson, C. Grant
;
Janes, Dustin
;
Ito, Natsuko
;
Blachut, Gregory
;
Sirard, Stephen
;
Someya, Yasunobu
;
Doise, Jan
;
Mizuochi, Ryuta
;
Lane, Austin
;
Vandenberghe, Geert
;
Rincon Delgadillo, Paulina
;
Yang, XiaoMin
;
Ellison, Christopher
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1946
since deposited on 2021-10-26
418
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1946
since deposited on 2021-10-26
418
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations