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A progress report on DSA of high-chi silicon containing block co-polymers

Date

2018
Proceedings Paper
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dc.contributor.authorWillson, C. Grant
dc.contributor.authorJanes, Dustin
dc.contributor.authorIto, Natsuko
dc.contributor.authorBlachut, Gregory
dc.contributor.authorSirard, Stephen
dc.contributor.authorSomeya, Yasunobu
dc.contributor.authorDoise, Jan
dc.contributor.authorMizuochi, Ryuta
dc.contributor.authorLane, Austin
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorYang, XiaoMin
dc.contributor.authorEllison, Christopher
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.date.accessioned2021-10-26T09:26:24Z
dc.date.available2021-10-26T09:26:24Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32269
dc.identifier.urlhttps://doi.org/10.1117/12.2299966
dc.source.beginpage105860O
dc.source.conferenceAdvances in Patterning Materials and Processes XXXV
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.title

A progress report on DSA of high-chi silicon containing block co-polymers

dc.typeProceedings paper
dspace.entity.typePublication
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