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Browsing by Author "Larsen, Olaf F.A."

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    Pitch doubling through dual-patterning lithography challenges in integration and litho budgets

    Dusa, Mircea  
    ;
    Quaedackers, John
    ;
    Larsen, Olaf F.A.
    ;
    Meessen, J.
    ;
    van der Heijden, Eddy
    Proceedings paper
    2007, Optical Microlithography XX, 27/02/2007, p.65200G

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