Publication:

Pitch doubling through dual-patterning lithography challenges in integration and litho budgets

Date

2007

Proceedings Paper

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Author(s)

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Quaedackers, John

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Larsen, Olaf F.A.

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van der Heijden, Eddy

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van Ingen Schenau, Koen

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Jaenen, Patrick

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Maenhoudt, Mireille

Statistics

1978 since deposited on 2021-10-16

Acq. date: 2026-04-05