Browsing by Author "Latypov, Azat"
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Publication Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling
Journal article2023, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (22) 4, p.Art. 041603Publication Calibration and application of Gaussian random field models for exposure and resist stochastic in EUV lithography
Journal article review2022, JAPANESE JOURNAL OF APPLIED PHYSICS, (61) SD, p.SD0806Publication Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula
Proceedings paper2020, Extreme Ultraviolet (EUV) Lithography XI; 113230L (2020), 23/02/2020, p.113230L