Publication:

Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling

Date

2023
Journal article
https://doi.org/10.1117/1.JMM.22.4.041603
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Author(s)

Wei, Chih-, I
;
Kang, Seulki
;
Das, Sayantan  
;
Oya, Masahiro
;
Okamoto, Yosuke
;
Maruyama, Kotaro
;
Fenger, Germain
;
Latypov, Azat
;
Kusnadi, Ir
;
Khaira, Gurdaman
;
Yamazaki, Yuichiro
;
Gillijns, Werner  
;
Halder, Sandip  
;
Lorusso, Gian  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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899 since deposited on 2024-02-27
Acq. date: 2025-10-27

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899 since deposited on 2024-02-27
Acq. date: 2025-10-27

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