Browsing by Author "Lauerhaas, J."
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Publication Damage-free removal of nano-sized particles, heading towards a red brick wall
Oral presentation2003, International Sematech Wafer Cleaning and Surface Preparation WorkshopPublication Issues associated with cleaning of nanosize particles
Proceedings paper2003, CMP-MIC 8th Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, 19/02/2003, p.334-343