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Damage-free removal of nano-sized particles, heading towards a red brick wall
Publication:
Damage-free removal of nano-sized particles, heading towards a red brick wall
Date
2003
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mertens, Paul
;
Fyen, Wim
;
Vereecke, Guy
;
Xu, Kaidong
;
Lauerhaas, J.
;
Holsteyns, Frank
;
Van Doorne, Patrick
;
Kesters, Els
;
Vos, Rita
Journal
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1982
since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations
Metrics
Views
1982
since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations