Browsing by Author "Lauwagie, Tom"
Now showing 1 - 4 of 4
- Results per page
- Sort Options
Publication High throughput measurement techniques for wafer level yield inspection of MEMS devices
Proceedings paper2008, 9th International Symposium on Laser Metrology, 30/06/2008, p.71550MPublication Highly reliable and extremely stable SiGe micro-mirrors
Proceedings paper2007-01, Technical Digest 20th IEEE International Micro Electro Mechanical Systems Conference - MEMS, 21/01/2007, p.759-762Publication Resonant-based identification of the elastic properties of the layered materials: Application to air-plasma sprayed thermal barrier coatings
Publication Resonant-based identification of the Poisson's ratio of orthotropic materials