Highly reliable and extremely stable SiGe micro-mirrors

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Author(s)

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Haspeslagh, Luc

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Eyckens, Brenda

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De Wolf, Ingrid

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Muller, Philippe

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Willegems, Myriam

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Locorotondo, Sabrina

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Boullart, Werner

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1993 since deposited on 2021-10-16

Acq. date: 2025-10-23