Publication:

Highly reliable and extremely stable SiGe micro-mirrors

Date

2007-01
Proceedings Paper
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Author(s)

Gromova, Maria
;
Haspeslagh, Luc  
;
Verbist, Agnes
;
Du Bois, Bert  
;
Van Hoof, Rita  
;
Eyckens, Brenda
;
Sijmus, Bram
;
De Wolf, Ingrid  
;
Simons, Veerle  
;
Muller, Philippe  
;
Lauwagie, Tom
;
Willegems, Myriam  
;
Locorotondo, Sabrina  
;
Boullart, Werner  
;
Baert, Kris
;
Witvrouw, Ann

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2001 since deposited on 2021-10-16
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