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Browsing by Author "Lawrence, W.G."

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    Line edge roughness: experimental results related to a two-parameter model

    Leunissen, Peter
    ;
    Lawrence, W.G.
    ;
    Ercken, Monique  
    Oral presentation
    2003, Micro and Nano Engineering 2003
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    Line edge roughness: experimental results related to a two-parameter model

    Leunissen, Peter
    ;
    Lawrence, W.G.
    ;
    Ercken, Monique  
    Journal article
    2004, Microelectronic Engineering, 73-74, p.25-270

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