Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Line edge roughness: experimental results related to a two-parameter model
Publication:
Line edge roughness: experimental results related to a two-parameter model
Copy permalink
Date
2003
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Leunissen, Peter
;
Lawrence, W.G.
;
Ercken, Monique
Journal
Abstract
Description
Metrics
Views
1924
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1924
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations