Browsing by Author "Lawrie, Kirsten J."
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Publication Chain scission resists for extreme ultraviolet lithography based on high performance polysulfone-containing polymers
;Lawrie, Kirsten J. ;Blakey, Idriss ;Blinco, James P. ;Cheng, Han Hao; Jack, Kevin S.Journal article2011, Journal of Materials Chemistry, (21) 15, p.5629-5637