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Browsing by Author "Lawrie, Kirsten J."

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    Publication

    Chain scission resists for extreme ultraviolet lithography based on high performance polysulfone-containing polymers

    Lawrie, Kirsten J.
    ;
    Blakey, Idriss
    ;
    Blinco, James P.
    ;
    Cheng, Han Hao
    ;
    Gronheid, Roel  
    ;
    Jack, Kevin S.
    Journal article
    2011, Journal of Materials Chemistry, (21) 15, p.5629-5637

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