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Browsing by Author "Leca, V."

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    Publication

    New low-stress PECVD Poly-SiGe layers for MEMS

    Rusu, Cristina
    ;
    Sedky, S.
    ;
    Parmentier, Brigitte  
    ;
    Verbist, Agnes
    ;
    Richard, Olivier  
    ;
    Brijs, Bert
    Journal article
    2003, Journal of Microelectromechanical Systems, (12) 6, p.816-825

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