Browsing by Author "Leca, V."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication New low-stress PECVD Poly-SiGe layers for MEMS
Journal article2003, Journal of Microelectromechanical Systems, (12) 6, p.816-825
New low-stress PECVD Poly-SiGe layers for MEMS