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Browsing by Author "Lee, Y.C."

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    Selective wet etching in fabricating SiGe and Ge nanowires for gate-all-around MOSFETs

    Liu, W.D.
    ;
    Lee, Y.C.
    ;
    Sekiguchi, R.
    ;
    Yoshida, Y.
    ;
    Komori, K.
    ;
    Wostyn, Kurt  
    ;
    Sebaai, Farid  
    Proceedings paper
    2018, Ultra Clean Processing of Semiconductor Surfaces XIV - UCPSS, 3/09/2018, p.101-106

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