Browsing by Author "Lee, Yu-tsung"
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Publication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication High throughput grating qualification of directed self-assembly patterns using optical metrology
Oral presentation2013, 39th International Conference on Micro and Nano Engineering - MNEPublication High throughput grating qualification of directed self-assembly patterns using optical metrology
Journal article2014, Microelectronic Engineering, 123, p.175-179Publication Origin of defect in directed self-assembly of block copolymers using feature multiplication
; ; Lin, GuanyangProceedings paper2013, IEEE Litho Workshop, 11/11/2013