Publication:

Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow

Date

2014
Proceedings Paper
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Author(s)

Gronheid, Roel  
;
Rincon Delgadillo, Paulina  
;
Pathangi Sriraman, Hari
;
Van Den Heuvel, Dieter  
;
Parnell, Doni
;
Chan, BT  
;
Lee, Yu-tsung
;
Van Look, Lieve  
;
Cao, Yi
;
Her, YoungJun  
;
Lin, Guanyang
;
Harukawa, Ryoto
;
Nagaswami, Venkat
;
D'Urzo, Lucia  
;
Somervell, Mark
;
Nealey, Paul

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2027 since deposited on 2021-10-22
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