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Browsing by Author "Lefaucheux, P.L."

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    Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)

    Chanson, Romain
    ;
    Lefaucheux, P.L.
    ;
    Dussart, R.
    ;
    Tillocher, T.
    ;
    Shen, P.
    ;
    Urabe, K.
    ;
    Dussarat, C.
    Meeting abstract
    2017, AVS 64th International Symposium & Exhibition, 28/10/2017, p.EM-ThP5

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