Browsing by Author "Lefaucheux, P.L."
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Publication Low-k cryo-etching : comparison of four different High Boiling Point Organic (HBPO)
;Chanson, Romain ;Lefaucheux, P.L. ;Dussart, R. ;Tillocher, T. ;Shen, P. ;Urabe, K.Dussarat, C.Meeting abstract2017, AVS 64th International Symposium & Exhibition, 28/10/2017, p.EM-ThP5