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Browsing by Author "Lefaucheux, Phillipe"

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    Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above -50° C

    Chanson, Romain
    ;
    Zhang, Liping  
    ;
    Naumove, Sergei
    ;
    Mankelevich, Yu.
    ;
    Tillocher, Thomas
    Journal article
    2018, Scientific Reports, 8, p.1886

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