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Browsing by Author "Lefferts, S."

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    Toward successful integration of gap-filling ultralow-k dielectrics

    Zhang, Liping  
    ;
    de Marneffe, Jean-Francois  
    ;
    Lesniewska, Alicja  
    ;
    Verdonck, Patrick  
    ;
    Heylen, Nancy  
    Proceedings paper
    2016, IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC, 23/05/2016, p.21-23

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