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Browsing by Author "Lefferts, Scott"

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    Integration of ultralow-k dielectrics using a template replacement approach

    Zhang, Liping  
    ;
    de Marneffe, Jean-Francois  
    ;
    Murdoch, Gayle  
    ;
    Vega Gonzalez, Victor  
    Meeting abstract
    2017, MRS Spring Meeting Sympsoium E: Advanced Interconnects for Logic and Memory Applications : Materials, Processes and Integration, 17/04/2017, p.ED9.3

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