Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Lehnen, P."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS?

    Conard, Thierry  
    ;
    Chen, Ping
    ;
    Janssens, Tom
    ;
    Brijs, Bert
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    2005, SIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry, 12/09/2005

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings