Browsing by Author "Leinenbach, Christina"
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Publication SIGEM, low temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits
;Ramos-Martos, Juan ;Ceballos-Caceres, JoaquinRagel-Morales, AntonioProceedings paper2005, Smart Sensors, Actuators, and MEMS II, 9/05/2005, p.293-306