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Browsing by Author "Leinenbach, Christina"

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    SIGEM, low temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits

    Ramos-Martos, Juan
    ;
    Ceballos-Caceres, Joaquin
    ;
    Ragel-Morales, Antonio
    Proceedings paper
    2005, Smart Sensors, Actuators, and MEMS II, 9/05/2005, p.293-306

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